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Publications by Uldis Locans
Quantitative Characterization of Absorber and Phase Defects on EUV Reticles Using Coherent Diffraction Imaging
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Amplitude and Phase Defect Inspection on EUV Reticles Using RESCAN
Related publications
Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-On-Insulator Nanostructures
Advanced Materials
Mechanics of Materials
Materials Science
Nanotechnology
Mechanical Engineering
Nanoscience
Full-Field Stroboscopic Imaging of Acoustic and Thermal Dynamics in Isolated Nanostructures Using Tabletop EUV Coherent Imaging
Microscopy and Microanalysis
Instrumentation
Quantitative Nanotomography of Amorphous and Polycrystalline Samples Using Coherent X-Ray Diffraction
When Holography Meets Coherent Diffraction Imaging
Optics Express
Optics
Atomic
Molecular Physics,
Nanoscale Topography and Spatial Light Modulator Characterization Using Wide-Field Quantitative Phase Imaging
Optics Express
Optics
Atomic
Molecular Physics,
Quantitative Phase Imaging Using Swept Source
Quantum Phase-Sensitive Diffraction and Imaging Using Entangled Photons
Proceedings of the National Academy of Sciences of the United States of America
Multidisciplinary
Applications of Diffraction Tomography on Quantitative Imaging Using Ultrasonic Guided Plate Waves
