Discover open access scientific publications

Search, annotate, share and cite publications

Publications by Vibhu Jindal

Origin of Defects on Targets Used to Make Extreme Ultraviolet Mask Blanks

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Related publications

Extreme Ultraviolet Interferometry

English

Extreme Ultraviolet Multilayer Reflectors

AIP Conference Proceedings

English

Extreme Ultraviolet Alignment and Testing of a Four-Mirror Ring Field Extreme Ultraviolet Optical System

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Erratum To: Reconstruction of Solar Extreme Ultraviolet Flux 1740 – 2015

Planetary Science

English

Terbium-Based Extreme Ultraviolet Multilayers

Molecular Physics,

English

Photoluminescence-Based Detection of Particle Contamination on Extreme Ultraviolet Reticles

Review of Scientific Instruments

Instrumentation

English

Empirical Determination of Extreme Ultraviolet Imager Background

Journal of Geophysical Research: Space Physics

English

Overcoming Mask Blank Defects in EUV Lithography

English

Extending Resonant Inelastic X-Ray Scattering to the Extreme Ultraviolet

Frontiers in Physics

Materials Science

Theoretical Chemistry

Mathematical Physics

English