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Publications by W. J. Goedheer
Spatial Behavior of Energy Relaxation of Electrons in Capacitively Coupled Discharges: Comparison Between Ar and SiH4
Journal of Applied Physics
Astronomy
Physics
Modeling and Experiments on Differential Pumping in Linear Plasma Generators Operating at High Gas Flows
Journal of Applied Physics
Astronomy
Physics
Related publications
Breakdown Mechanism of Capacitively Coupled RF Discharges
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Capacitively Coupled Radio-Frequency Hydrogen Discharges: The Role of Kinetics
Journal of Applied Physics
Astronomy
Physics
Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Electron Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Oxygen Discharges
Plasma Sources Science and Technology
Condensed Matter Physics
Excitation Dynamics in Electrically Asymmetric Capacitively Coupled Radio Frequency Discharges: Experiment, Simulation, and Model
Plasma Sources Science and Technology
Condensed Matter Physics
Experimental and Computational Investigations of the Effect of the Electrode Gap on Capacitively Coupled Radio Frequency Oxygen Discharges
Physics of Plasmas
Condensed Matter Physics
Dust Formation and Charging in an Ar/SiH4 Radio‐frequency Discharge
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Characterization of Transport of Titanium Neutral Atoms Sputtered in Ar and Ar/N2 HIPIMS Discharges
Plasma Sources Science and Technology
Condensed Matter Physics
Modeling Discharge and Surface Processes in Capacitively Coupled Reactors
