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Publications by YUKINOBU SHIBATA
Electron Beam Lithography System.
Journal of the Japan Society of Precision Engineering
Related publications
Precision Analysis of Electron Beam Lithography
IEEJ Transactions on Electronics, Information and Systems
Electronic Engineering
Electrical
Multiple-Beam Interference Lithography With Electron Beam Written Gratings
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Three-Dimensional in Situ Electron Beam Lithography Using Water Ice
Nano Letters
Materials Science
Condensed Matter Physics
Mechanical Engineering
Nanoscience
Bioengineering
Nanotechnology
Chemistry
Nanodevice Fabrication Technologies With Advanced High Resolution Electron Beam Lithography Systems
Nanoindustry Russia
Effects of Fast Secondary Electrons to Low-Voltage Electron Beam Lithography
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
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Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies
Analytic Estimation and Minimization of Line Edge Roughness in Electron-Beam Lithography
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Electron Beam Lithography Using GaAs Oxidized Resist for GaAs/AlGaAs Ultrafine Structure Fabrication.
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Short-Channel Inverted Staggered A-Si:H Thin Film Transistors Fabricated by Electron-Beam Lithography
