Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Yasunori Ohtsu
Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Effect of Electron Energy on Light-Emission Luminance and on Luminescent Color of Phosphors in an Electrodeless Discharge Plasma
Journal of the Illuminating Engineering Institute of Japan (Shomei Gakkai Shi)
Electronic Engineering
Electrical
Related publications
Capacitively Coupled Radio-Frequency Hydrogen Discharges: The Role of Kinetics
Journal of Applied Physics
Astronomy
Physics
Predictions of Ion Energy Distributions and Radical Fluxes in Radio Frequency Biased Inductively Coupled Plasma Etching Reactors
Journal of Applied Physics
Astronomy
Physics
Electron Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Oxygen Discharges
Plasma Sources Science and Technology
Condensed Matter Physics
Excitation Dynamics in Electrically Asymmetric Capacitively Coupled Radio Frequency Discharges: Experiment, Simulation, and Model
Plasma Sources Science and Technology
Condensed Matter Physics
Spatial Behavior of Energy Relaxation of Electrons in Capacitively Coupled Discharges: Comparison Between Ar and SiH4
Journal of Applied Physics
Astronomy
Physics
The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- And Dual-Frequency Capacitively Coupled Plasmas
Plasma Sources Science and Technology
Condensed Matter Physics
Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures
Journal of Applied Physics
Astronomy
Physics
Secondary-Ion Emission From III-V Semiconductive Materials Under MeV-energy Heavy-Ion Bombardment
Physical Review A
Experimental and Computational Investigations of the Effect of the Electrode Gap on Capacitively Coupled Radio Frequency Oxygen Discharges
Physics of Plasmas
Condensed Matter Physics
