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Publications by Yohei YAMADA

Curved-Line Cutting Using a Flexible Circular Saw

Journal of Advanced Mechanical Design, Systems and Manufacturing
IndustrialMechanical EngineeringManufacturing Engineering
2012English

Study on Reduction of Micro-Scratch in Oxide CMP for Multi-Level Interconnection

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
2008English

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