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Publications by Yoshitaka SETOGUCHI
Properties of the B-Si-N Ceramic Thin Films by Plasma-Cvd.
SHINKU
Related publications
Electrical and Mechanical Properties of Si-B-N Films Made by Plasma-Enhanced Chemical Vapor Deposition.
Transactions of the Japan Society of Mechanical Engineers Series A
Growth and Properties of Amorphous Ti–B–Si–N Thin Films Deposited by Hybrid HIPIMS/DC-magnetron Co-Sputtering From TiB2 and Si Targets
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
Chemistry
Mechanical Properties of B(C,N) Thin Film by Plasma-Assisted Chemical Vapor Deposition.
SHINKU
Preparation of TiN Films by ECR Plasma CVD
Morphology and Electron Emission Properties of Nanocrystalline CVD Diamond Thin Films
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Growth of Diamond Thin Films Using a Simple Microwave Plasma CVD Apparatus.
SHINKU
Phonon Participation in Thermodynamics and Superconductive Properties of Thin Ceramic Films
Outgassing Properties of CVD-SiO2 Films.
SHINKU
The Structure and Properties of Sputter-Deposited Co-Si Alloy Thin Films
Journal of Physics Condensed Matter
Materials Science
Condensed Matter Physics
