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Publications by Yuzo MORI
EEM (Elastic Emission Machining) (1st Report)
Journal of the Japan Society of Precision Engineering
Development of a Measuring Instrument for Nanoparticles on the Si Wafer Using a Laser Light Scattering Method
Journal of the Japan Society for Precision Engineering, Contributed Papers
CO2 Laser-Induced Surface Oxidation and Etching of Si and Si3N4.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
High-Rate Deposition of Amorphous Silicon Thin Films by Atmospheric Pressure Plasma Chemical Vapor Deposition. (1st Report). Design and Production of the Atmospheric Pressure Plasma CVD Apparatus With Rotary Electrode.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
A Study on Electrochemical Machining Method in Ultrapure Water. Increase of Hydroxyl Lon in Ultrapure Water by Catalytic Reaction.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Special Issue on Electron Theory in Precision Engineering. Electron Theory Based on Quantum Mechanics in Future Precision Engineering.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
A Method for Machining Free Formed Surface by Using a CAD/CAM System by a Personal Computer and an Optical Measurement of Object Shapes. (1st Report). Optical Profile NC Machining.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
High-Rate Deposition of Amorphous Silicon Film by Atmospheric Pressure Plasma Chemical Vapor Deposition. (2nd Report). Investigation for Higher Deposition Rate.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Atomic Force Between Diamond and Metal Surfaces.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Frontier Technology at the Atomic and Electronic Levels. The Aim of the Technical Committee on Ultra Precision Machining.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
