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Integration of Trench-Isolated Through-Wafer Interconnects With 2d Capacitive Micromachined Ultrasonic Transducer Arrays

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2007English

Thermal Spray: Preserving 100 Years of Technology

Journal of Thermal Spray Technology
SurfacesFilmsCoatingsMaterials ChemistryCondensed Matter Physics
2006English

A MEMS Electrostatic Particle Transportation System

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1999English

Quality Control of the Intrinsic Deposition Efficiency From the Controls of the Splat Morphologies and the Deposit Microstructure

Journal of Thermal Spray Technology
SurfacesFilmsCoatingsMaterials ChemistryCondensed Matter Physics
1997English

Analysis of a High-Velocity Oxygen-Fuel (HVOF) Thermal Spray Torch Part 2: Computational Results

Journal of Thermal Spray Technology
SurfacesFilmsCoatingsMaterials ChemistryCondensed Matter Physics
1996English

Porous Silicon Bulk Micromachining for Thermally Isolated Membrane Formation

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1997English

A Non-Pixel Image Reader for Continuous Image Detection Based on Tandem Heterostructures

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2004English

Thin Teflon-Like Films for Eliminating Adhesion in Released Polysilicon Microstructures

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1998English

In Situ Characterization of Small-Particle Plasma Sprayed Powders

Journal of Thermal Spray Technology
SurfacesFilmsCoatingsMaterials ChemistryCondensed Matter Physics
2002English

Design and Fabrication of an Overhanging Xy-Microactuator With Integrated Tip for Scanning Surface Profiling

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1994English

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