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Publications in Metals

Porous Silicon Bulk Micromachining for Thermally Isolated Membrane Formation

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1997English

A Non-Pixel Image Reader for Continuous Image Detection Based on Tandem Heterostructures

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2004English

Thin Teflon-Like Films for Eliminating Adhesion in Released Polysilicon Microstructures

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1998English

Design and Fabrication of an Overhanging Xy-Microactuator With Integrated Tip for Scanning Surface Profiling

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
1994English

Charge Redistribution in Electrochemically Actuated Mechanical Sensors

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2009English

Design of a Magnetostrictive (MS) Actuator

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2008English

Creating Low-Impedance Tetrodes by Electroplating With Additives

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2009English

A 4μs Integration Time Imager Based on CMOS Single Photon Avalanche Diode Technology

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2006English

Microactuators Based on Ion Implanted Dielectric Electroactive Polymer (EAP) Membranes

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2006English

Consideration of Theoretical Equation for Output Voltage of Linear Displacement Sensor Using Meander Coil and Pattern Guide

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2008English

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