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Publications in Polymers

Poly (.ALPHA.-methyl-p-hydroxystyrene-co-methacrylonitrile) Based Single-Layer Resists for VUV Lithography: (2) F2 Excimer Laser Exposure Characteristics.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2000English

193nm Photoresist R&D the Risk & Challenge

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1996English

A Study of Photoresist Pattern Freezing for Double Imaging Using 172nm VUV Flood Exposure

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2008English

Cohesion Property of Resist Micro Pattern Analyzed by Using Atomic Force Microscope (AFM)

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2003English

Effect of Spacer Unit on Photo-Initiated Thermal Crosslinking of Polymers Having Carbamoyloxyimino Groups in Side-Chains

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2007English

Use of Interferometric Lithography to Characterize the Spatial Resolution of a Photoresist Film

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2003English

Outgassing Characteristics of Structural Materials and the Removal of Contaminants From EUVL Masks Using 172-Nm Radiation

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2004English

Optical Properties of Polyalicyclic Polyimides.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1998English

Second-Harmonic Generation in Langmuir-Blodgett Films of P-Nitroaniline Derivatives.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1993English

The Photopolymer Science and Technology Award

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2009English

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