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Publications in Surfaces

Tuning of Material Properties of ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition at Room Temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2018English

Solution Processed ZnO Homogeneous Quasisuperlattice Materials

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2017English

Incorporation of Al or Hf in Atomic Layer Deposition TiO2 for Ternary Dielectric Gate Insulation of InAlN/GaN and AlGaN/GaN Metal-Insulator-Semiconductor-Heterojunction Structure

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2017English

Fabrication of GaN Nanorods by Focused Ion Beam

Microelectronic Engineering
SurfacesElectronic EngineeringCondensed Matter PhysicsElectronicMolecular Physics,NanoscienceOpticalElectricalAtomicMagnetic MaterialsFilmsNanotechnologyOpticsCoatings
2012English

Oxidation Resistance of Quintuple Ti-Al-Si-C-N Coatings and Associated Mechanism

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2012English

On the Change of Preferential Growth Orientation in Chemical Vapor Deposition of Titanium Carbide by Aromatic Hydrocarbon Precursors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2013English

Electronic Effects of Cd on the Formation of the CdS/CuInS2 Heterojunction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2012English

Effect of the Base Pressure Achieved Prior Deposition on the Main Properties of ZnO:Al Films Obtained by DC Magnetron Sputtering at Room Temperature for Electrical Contact Use

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2017English

Enhancing the Platinum Atomic Layer Deposition Infiltration Depth Inside Anodic Alumina Nanoporous Membrane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2015English

Silicon Oxynitride Films Deposited by Reactive High Power Impulse Magnetron Sputtering Using Nitrous Oxide as a Single-Source Precursor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2015English

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