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Overview and Status of the 0.5NA EUV Microfield Exposure Tool at Berkeley Lab
doi 10.1117/12.2516339
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Date
March 26, 2019
Authors
Christopher N. Anderson
Arnaud Allezy
Weilun Chao
Carl Cork
Will Cork
Rene Delano
Jason DePonte
Michael Dickinson
Geoff Gaines
Jeff Gamsby
Eric Gullikson
Gideon Jones
Stephen Meyers
Ryan Miyakawa
Patrick Naulleau
Senajith Rekawa
Farhad Salmassi
Brandon Vollmer
Daniel Zehm
Wenhua Zhu
Publisher
SPIE
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