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Dynamic Scaling of Plasma Etched InP Surface
doi 10.1109/iciprm.2000.850267
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Date
Unknown
Authors
M. Silova
D.M. Bruls
A.Yu. Silov
B.H.V. Roy
E. Smalbrugge
F. Karouta
P.M. Koenraad
J.H. Wolter
Publisher
IEEE
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