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Thickness Mapping of High-Κ Dielectrics at the Nanoscale

Applied Physics Letters - United States
doi 10.1063/1.4863947
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Abstract

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Categories
AstronomyPhysics
Date

February 3, 2014

Authors
J. TrapnauskasM. RommelA. J. BauerL. Frey
Publisher

AIP Publishing


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