Tunable High-Κ ZrxAl1−xOy Thin Film Dielectrics From All-Inorganic Aqueous Precursor Solutions

RSC Advances- United Kingdom

doi 10.1039/c7ra08362a

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Chemical Engineering

Date

January 1, 2017

Authors

E. C. Waddington

S. W. Boettcher

Publisher

Royal Society of Chemistry (RSC)

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