Microfabrication of Cavities in Polydimethylsiloxane Using DRIE Silicon Molds

Lab on a Chip - Miniaturisation for Chemistry and Biology - United Kingdom
doi 10.1039/b714742b
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Royal Society of Chemistry (RSC)

Related search

Three-Dimensional Microfabrication in Bulk Silicon Using High-Energy Protons

Applied Physics Letters
AstronomyPhysics
2004English

Microfabrication of a Mechanically Controllable Break Junction in Silicon

Applied Physics Letters
AstronomyPhysics
1995English

Ion-Channel Chips Based on Silicon Microfabrication

Hyomen Kagaku
2014English

Silicon Microfabrication: Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2 O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes (Adv. Funct. Mater. 6/2017)

Advanced Functional Materials
Materials ScienceCondensed Matter PhysicsElectrochemistryNanoscienceOpticalBiomaterialsMagnetic MaterialsNanotechnologyChemistryElectronic
2017English

A High-Performance Scintillator-Silicon-Well X-Ray Microdetector Based on DRIE Techniques

Sensors and Actuators, A: Physical
SurfacesElectronic EngineeringAlloysCondensed Matter PhysicsInstrumentationMetalsOpticalElectricalMagnetic MaterialsFilmsCoatingsElectronic
2001English

Drie Vormen Van Weten

De Uil van Minerva
2018English

High-Q-Factor Al2O3 Micro-Trench Cavities Integrated With Silicon Nitride Waveguides on Silicon

Optics Express
OpticsAtomicMolecular Physics,
2018English

Drie Vragen Aan...

Zorg + Welzijn
2018English

Cooling Aluminum Molds Using Heat Pipes. Final Report

1978English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy