Optimization of Gas Injection Conditions During Deposition of AlN Layers by Novel Reactive GIMS Method

Materials Science-Poland - Germany
doi 10.2478/s13536-013-0169-6
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Walter de Gruyter GmbH

Related search

Optimization of AlN Thin Layers on Diamond Substrates for High Frequency SAW Resonators

Materials Letters
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2012English

Formation of Zirconia Films by the Aerosol Gas Deposition Method

Journal of the Ceramic Society of Japan
Materials ChemistryChemistryCondensed Matter PhysicsCompositesCeramics
2010English

Properties of AlN Film Formed by Vacuum Arc Deposition Process

IEEJ Transactions on Fundamentals and Materials
Electronic EngineeringElectrical
1991English

Enhancement of Heat Transfer Between Two Horizontal Liquid Layers by Gas Injection at the Bottom

Nuclear Technology
High Energy PhysicsNuclearEngineeringNuclear EnergyCondensed Matter Physics
1982English

Ultrafine Powders of TiN, ZrN, HfN and AlN Produced by the Reactive Gas Evaporation Technique With Electron Beam Heating

SHINKU
1982English

Structural, Optical and Electrical Properties of Zinc Oxide Layers Produced by Pulsed Laser Deposition Method

Nanoscale Research Letters
Materials ScienceNanotechnologyCondensed Matter PhysicsNanoscience
2017English

Modifying the Microstructure and Morphology of Film Surface Layers by Manipulating Chemical Vapor Deposition Reactor Conditions

Journal of Applied Physics
AstronomyPhysics
2001English

Deposition of SiO[sub 2] Layers on GaN by Photochemical Vapor Deposition

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2003English

Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Nanomaterials
Materials ScienceChemical Engineering
2020English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy