Minimize Electron Beam Damage During Characterization of Carbon-Depletion in Ultra Low-K Dielectric Materials by STEM EELS Elemental Mapping

Microscopy and Microanalysis- United Kingdom

doi 10.1017/s143192761600252x

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Instrumentation

Date

July 1, 2016

Authors

Michael Gribelyuk

Publisher

Cambridge University Press (CUP)

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