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Laser-Aided Diagnostics of Atoms and Particulates in Magnetron Sputtering Plasmas
doi 10.1063/1.3192233
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Date
January 1, 2009
Authors
N. Nafarizal
N. Takada
K. Sasaki
Swee-Ping Chia
Kurunathan Ratnavelu
Muhamad Rasat Muhamad
Publisher
AIP