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Publications by Alain C. Diebold

The Continuous Anodic Oxidation Technique

AIP Conference Proceedings

English

Metrology and Characterization for Extending Silicon CMOS

AIP Conference Proceedings

English

Metrology for High-Frequency Nanoelectronics

AIP Conference Proceedings

English

Metrology Requirements and the Limits of Measurement Technology for the Semiconductor Industry

AIP Conference Proceedings

English

Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures

AIP Conference Proceedings

English

Metrology (Including Materials Characterization) for Nanoelectronics

AIP Conference Proceedings

English

Characterization of Integrated Nano Materials

English

Porous SiOCH Post Plasma Damage Characterization Using Ellipsometric Porosimetry

English

Metrology for Emerging Materials, Devices, and Structures: The Example of Graphene

English

Simulations of Scatterometry Down to 22 Nm Structure Sizes and Beyond With Special Emphasis on LER

English