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Publications by Dan Herr
Protocol Optimisation for Work-Function Measurements of Metal Gates Using Kelvin Force Microscopy
AIP Conference Proceedings
Astronomy
Physics
Development of a Focused-Beam Ellipsometer Based on a New Principle
AIP Conference Proceedings
Astronomy
Physics
The Continuous Anodic Oxidation Technique
AIP Conference Proceedings
Astronomy
Physics
Metrology and Characterization for Extending Silicon CMOS
AIP Conference Proceedings
Astronomy
Physics
Metrology for High-Frequency Nanoelectronics
AIP Conference Proceedings
Astronomy
Physics
Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures
AIP Conference Proceedings
Astronomy
Physics
Characterization of Integrated Nano Materials
Porous SiOCH Post Plasma Damage Characterization Using Ellipsometric Porosimetry
Metrology for Emerging Materials, Devices, and Structures: The Example of Graphene
Simulations of Scatterometry Down to 22 Nm Structure Sizes and Beyond With Special Emphasis on LER
