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Publications by Erik M. Secula
Metrology for High-Frequency Nanoelectronics
AIP Conference Proceedings
Astronomy
Physics
Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures
AIP Conference Proceedings
Astronomy
Physics
Characterization of Integrated Nano Materials
Porous SiOCH Post Plasma Damage Characterization Using Ellipsometric Porosimetry
Metrology for Emerging Materials, Devices, and Structures: The Example of Graphene
Simulations of Scatterometry Down to 22 Nm Structure Sizes and Beyond With Special Emphasis on LER
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