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Publications by F. Meillaud-Sculati
Study of the Microstructure Transition Width From Amorphous to Microcrystalline Silicon as a Function of the Input Silane Concentration
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From Amorphous to Microcrystalline Silicon Films Prepared by Hydrogen Dilution Using the VHF (70 MHz) GD Technique
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Formation of Cationic Silicon Clusters in a Remote Silane Plasma and Their Contribution to Hydrogenated Amorphous Silicon Film Growth
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PARAMETERS CONTROLLING THE DEPOSITION OF AMORPHOUS AND MICROCRYSTALLINE SILICON IN Si/H DISCHARGE PLASMAS
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Determining the Material Structure of Microcrystalline Silicon From Raman Spectra
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Microstructure and Properties of Ultrathin Amorphous Silicon Nitride Protective Coating
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