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Publications by Hideyuki Uano

Study on Property of Atomic Layer Epitaxy Growth of InN by Using Indium Chloride

Journal of Advanced Science
1992English

Related publications

Atomic Layer-By-Layer Epitaxy of Silicon and Germanium Using Flash Heating in CVD

Le Journal de Physique IV
1995English

Atomic Layer Deposition of InN Using Trimethylindium and Ammonia Plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2019English

Formation of InGaAs Fins by Atomic Layer Epitaxy on InP Sidewalls

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
EngineeringAstronomyPhysics
2014English

Surface Smoothing of GaAs Microstructure by Atomic Layer Epitaxy

Applied Physics Letters
AstronomyPhysics
1999English

Atomic-Layer Level Control in SiC Crystal Growth Using Gas Source Molecular Beam Epitaxy.

SHINKU
1992English

Atomic Layer Epitaxy of IV Group Semiconductors.

Hyomen Kagaku
1991English

Two-Dimensional Self-Organization of CdS Ultra Thin Films by Confined Electrochemical Atomic Layer Epitaxy Growth

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Kinetic Model of II-VI(001) Semiconductor Surfaces: Growth Rates in Atomic Layer Epitaxy

Physical Review B
2004English

In situInvestigation of Growth Mechanism During Molecular Beam Epitaxy of In-Polar InN

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
EngineeringAstronomyPhysics
2011English

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