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Publications by Iacopo Mochi
Quantitative Characterization of Absorber and Phase Defects on EUV Reticles Using Coherent Diffraction Imaging
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Progress Overview of EUV Resists Status Towards High-Na EUV Lithography
Amplitude and Phase Defect Inspection on EUV Reticles Using RESCAN
Progress in EUV Resists Towards High-Na EUV Lithography
Increased Depth of Field Through Wave-Front Coding: Using an Off-Axis Zone Plate Lens With Cubic Phase Modulation in an EUV Microscope
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