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Publications by James Passarelli
Platinum and Palladium Oxalates: Positive-Tone Extreme Ultraviolet Resists
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
High-Sensitivity Molecular Organometallic Resist for EUV (MORE)
