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High-Sensitivity Molecular Organometallic Resist for EUV (MORE)
doi 10.1117/12.2086599
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Date
March 20, 2015
Authors
James Passarelli
Michael Murphy
Ryan Del Re
Miriam Sortland
Levi Dousharm
Michaela Vockenhuber
Yasin Ekinci
Mark Neisser
Daniel A. Freedman
Robert L. Brainard
Publisher
SPIE
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