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Publications by Junpeng Li
Structure and Dielectric Property of High-K ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Related publications
Diffusion Barrier Properties of Tungsten Nitride Films Grown by Atomic Layer Deposition From Bis(tert-Butylimido)bis(dimethylamido)tungsten and Ammonia
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Dielectric and Optical Properties of Zr Silicate Thin Films Grown on Si(100) by Atomic Layer Deposition
Journal of Applied Physics
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Crystalline SrZrO3 Deposition on Ge (001) by Atomic Layer Deposition for High-K Dielectric Applications
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Influence of Composition on Structure, Morphology and Dielectric Properties of BixAlyOz Composite Films Synthesized by Atomic Layer Deposition
AIP Advances
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Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels
Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels
ECS Meeting Abstracts
Dielectric Properties of Er−doped HfO2 (Er∼15%) Grown by Atomic Layer Deposition for High-Κ Gate Stacks
Applied Physics Letters
Astronomy
Physics
Thermally Induced Permittivity Enhancement in La-Doped ZrO2 Grown by Atomic Layer Deposition on Ge(100)
Applied Physics Letters
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Atomic Layer Deposition of Magnetic Thin Films
Acta Physica Polonica A
Astronomy
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