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Publications by M Wuttig

The Role of Energetic Ion Bombardment During Growth of TiO2thin Films by Reactive Sputtering

Journal of Physics D: Applied Physics

Condensed Matter Physics

Magnetic Materials

English

Related publications

Growth of TiO2 Rutile Films at Low Temperature by Reactive Sputtering.

English

Growth of HfN Thin Films by Reactive High Power Impulse Magnetron Sputtering

English

Preparation of Hard CNx Films by Reactive Sputtering.

English

Effect of Ion Irradiation on Vanadium Oxide Thin Films Deposited by Reactive RF Sputtering Technique

International Journal of Recent Technology and Engineering

Management of Technology

English

Effects of Substrate Temperature, Substrate Orientation, and Energetic Atomic Collisions on the Structure of GaN Films Grown by Reactive Sputtering

Journal of Applied Physics

English

HfSiON Films Deposited by Radio Frequency Reactive Sputtering

English

Nanostructure Formation During Deposition of TiN∕SiNx Nanomultilayer Films by Reactive Dual Magnetron Sputtering

Journal of Applied Physics

English

Reproducibility of Properties of SnOxThin Films Prepared by Reactive Sputtering

ElectroComponent Science and Technology

English

Preparation of Molybdenum Oxide Films by Means of Reactive Sputtering

English