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Publications by M. Yoshimaru
DMOTMDS/MTMOS Multi-Stacked SiOCH Films for Super-Low-K and Sufficient Modulus Formed by Damage-Free Neutral Beam Enhanced CVD
Highly Stable Fluorinated Plasma CVD Silicon Nitride Film by SiH4 Addition for ULSI Passivation
Related publications
A New Structure of Nanodisk (Stacked Nanodisk) Fabricated by Bio-Nano-Process and Defect-Free Neutral Beam Etching
Effect of N2 Flow Rate on TiN Films Formed by DC Plasma CVD
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Mechanics of Materials
Alloys
Materials Chemistry
Condensed Matter Physics
Metals
Tribology of Carbonaceous Films Formed by Ion Beam Assisted Deposition.
Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Alloys
Industrial
Mechanical Engineering
Metals
Materials Chemistry
Manufacturing Engineering
On Some Sufficient Condition for the Equality of Multi-Clone and Super-Clone
Journal of Siberian Federal University - Mathematics and Physics
Mathematics
Astronomy
Physics
Rendering Metals Ultralow Modulus and Nearly Hysteresis-Free and Linear Super-Elastic
Materials Horizons
Mechanics of Materials
Electronic Engineering
Materials Science
Electrical
Process Chemistry
Technology
Synthesis of TiO2 Films by Laser CVD
Journal of the Ceramic Society of Japan
Ambient Air Synthesis of Multi-Layer CVD Graphene Films for Low-Cost, Efficient Counter Electrode Material in Dye-Sensitized Solar Cells
FlatChem
Surfaces
Optical
Materials Chemistry
Magnetic Materials
Films
Composites
Electronic
Coatings
Ceramics
Ion Beam Enhanced Grain Growth in Thin Films
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Formation of ZrO2 Films by Low Pressure CVD Using ZTI-O2 System and Evaluation of Corrosion Resistances of the Films
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Mechanics of Materials
Alloys
Materials Chemistry
Condensed Matter Physics
Metals
