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Publications by Marc M. Heyns
Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels
Related publications
Atomic Layer Deposition of High-K Dielectric Layers on Ge and III-V MOS Channels
ECS Meeting Abstracts
Crystalline SrZrO3 Deposition on Ge (001) by Atomic Layer Deposition for High-K Dielectric Applications
Journal of Applied Physics
Astronomy
Physics
Atomic Layer Deposition of High-K Insulators on Epitaxial Graphene: A Review
Applied Sciences (Switzerland)
Instrumentation
Materials Science
Fluid Flow
Engineering
Computer Science Applications
Process Chemistry
Transfer Processes
Technology
Quantum Simulation of C-V and I-V Characteristics in Ge and III-V Materials/High-Κ MOS Devices
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Structure and Dielectric Property of High-K ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Atomic Layer Deposition of Functional Layers in Planar Perovskite Solar Cells
Solar RRL
InAs-oxide Interface Composition and Stability Upon Thermal Oxidation and High-K Atomic Layer Deposition
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Interface Properties Study on SiC MOS With High-K Hafnium Silicate Gate Dielectric
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Theory of Hole Mobility in Strained Ge and III-V P-Channel Inversion Layers With High-Κ Insulators
Journal of Applied Physics
Astronomy
Physics
