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Publications by Markus Tobler
SiNxCoatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content
ACS Applied Materials & Interfaces
Medicine
Materials Science
Nanotechnology
Nanoscience
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Hysteresis-Free Reactive High Power Impulse Magnetron Sputtering
Thin Solid Films
Surfaces
Alloys
Optical
Interfaces
Metals
Materials Chemistry
Magnetic Materials
Films
Coatings
Electronic
Growth of HfN Thin Films by Reactive High Power Impulse Magnetron Sputtering
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Evolution of Sputtering Target Surface Composition in Reactive High Power Impulse Magnetron Sputtering
Journal of Applied Physics
Astronomy
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High Power Impulse Magnetron Sputtering Discharge
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Silicon Oxynitride Films Deposited by Reactive High Power Impulse Magnetron Sputtering Using Nitrous Oxide as a Single-Source Precursor
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
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Interfaces
Condensed Matter Physics
Coatings
Investigation of Plasma Spokes in Reactive High Power Impulse Magnetron Sputtering Discharge
Journal of Applied Physics
Astronomy
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Effect of Peak Power in Reactive High Power Impulse Magnetron Sputtering of Titanium Dioxide
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
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Deposition of Yttria-Stabilized Zirconia Thin Films by High Power Impulse Magnetron Sputtering and Pulsed Magnetron Sputtering
Surface and Coatings Technology
Surfaces
Condensed Matter Physics
Interfaces
Materials Chemistry
Films
Coatings
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AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics