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Publications by Masato Kiuchi

Low-Energy Mass-Selected Ion Beam Deposition of Silicon Carbide With Bernas-Type Ion Source Using Methylsilane

English

Related publications

Measurement of Au Deposition Rates With Low-Energy Mass Separated Ion Beam Deposition Apparatus

English

Kaufman-Type Low-Energy Ion Source.

English

Polishing Silicon Modification Layer on Silicon Carbide Surface by Ion Beam Figuring

Chinese Optics Letters

Electronic Engineering

Molecular Physics,

Magnetic Materials

English

Formation of Aluminum Films on Silicon by Ion Beam Deposition: A Comparison With Ionized Cluster Beam Deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

High Energy Physics

Instrumentation

English

Ordered Silicon Nanostructures by Ion Beam Induced Glancing Angle Deposition

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Status of the SNS H− Ion Source and Low-Energy Beam Transport System

AIP Conference Proceedings

English

The Heavy Ion Beam Source

English

Focused-Ion Beam Induced Deposition of Copper

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Memory Characteristics of MOSFETs With Densely Stacked Silicon Nanocrystal Layers in the Gate Oxide Synthesized by Low-Energy Ion Beam

IEEE Electron Device Letters

Electronic Engineering

Magnetic Materials

English