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Publications by Noreen Harned

Progress Report: Engineers Take the EUV Lithography Challenge

English

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Progress in EUV Resists Towards High-Na EUV Lithography

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Progress Overview of EUV Resists Status Towards High-Na EUV Lithography

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EUV Lithography

Synchrotron Radiation News

High Energy Physics

Molecular Physics,

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Approach to EUV Lithography Simulation

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EUV Lithography and Exposure Tool.

Journal of Plasma and Fusion Research

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Secondary Electrons in EUV Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

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Pattern Replication in EUV Interference Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

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EUV Light Sources for Next-Gen Lithography

Optics and Photonics News

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Condensed Matter Physics

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Magnetic Materials

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Overcoming Mask Blank Defects in EUV Lithography

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