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Publications by Norikuni YABUMOTO
Special Issue on Key of High Yield of ULSI. Ultra Clean Gas Delivery System for ULSI Fabrication.
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Related publications
Numerical Simulation for ULSI Manufacturing Process
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Ultra Clean 1.1MW High Efficiency Natural Gas Engine Powered System
Electrodeposition of Copper From Ethylenediamine Complex Bath for ULSI Metallization.
Journal of the Surface Finishing Society of Japan
Metrology Aspects of SIMS Depth Profiling for Advanced ULSI Processes
Refractory Metal/Si Substrate Interfacial Reactions During ULSI Processing.
Materia Japan
Atomic Order Flattening of Hydrogen-Terminated Si(110) Substrate for Next Generation ULSI Devices
Special Issue: Plasmas for Micro‐fabrication
Plasma Processes and Polymers
Polymers
Plastics
Condensed Matter Physics
Highly Stable Fluorinated Plasma CVD Silicon Nitride Film by SiH4 Addition for ULSI Passivation
An Electrochemical Investigation of Additive Effect in Trench-Filling of ULSI Interconnects by Electroless Copper Deposition
Electrochemistry
Electrochemistry
