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Publications by P. Kudlacek

In Situ Reaction Mechanism Studies of Plasma-Assisted Atomic Layer Deposition of Al2O3

Applied Physics Letters

English

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Reaction Mechanisms During Plasma-Assisted Atomic Layer Deposition of Metal Oxides: A Case Study for Al2O3

Journal of Applied Physics

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Study on Deposition of Al2O3 Films by Plasma-Assisted Atomic Layer With Different Plasma Sources

Plasma Science and Technology

Condensed Matter Physics

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Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition

Journal of the Electrochemical Society

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Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride

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Revisiting the Growth Mechanism of Atomic Layer Deposition of Al2O3: A Vibrational Sum-Frequency Generation Study

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Interface Effect on Dielectric Constant of HfO2∕Al2O3 Nanolaminate Films Deposited by Plasma-Enhanced Atomic Layer Deposition

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Probing the Dielectric Properties of Ultrathin Al/Al2O3/Al Trilayers Fabricated Using in Situ Sputtering and Atomic Layer Deposition

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Substrate-Biasing During Plasma-Assisted Atomic Layer Deposition to Tailor Metal-Oxide Thin Film Growth

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