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Publications by Russell M. Hudyma

Fabrication and Testing of Optics for EUV Projection Lithography

English

Related publications

EUV Lithography

Synchrotron Radiation News

High Energy Physics

Molecular Physics,

English

Preparing for the Next Generation of EUV Lithography at the Center for X-Ray Optics

Synchrotron Radiation News

High Energy Physics

Molecular Physics,

English

EUV Lithography and Exposure Tool.

Journal of Plasma and Fusion Research

English

EUV Light Sources for Next-Gen Lithography

Optics and Photonics News

Electronic Engineering

Condensed Matter Physics

Molecular Physics,

Magnetic Materials

English

Freeform Optics Design, Fabrication and Testing Technologies for Space Applications

English

Evaluation of Resist Capability for EUV Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Development of Source System for EUV Lithography.

The Review of Laser Engineering

English

Progress in EUV Resists Towards High-Na EUV Lithography

English

Approach to EUV Lithography Simulation

English