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Publications by S. Shaya

Step and Flash Imprint Lithography: Template Surface Treatment and Defect Analysis

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2000English

Related publications

UV NIL Template Making and Imprint Evaluation

2008English

SEM Imaging of Resist Patterns Fabricated Through Imprint Lithography Techniques

Microscopy and Microanalysis
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2010English

Fabrication of Imprint Mold With Nanotrench Patterns by Edge Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2014English

Recent Advancements in 193 Nm Step and Scan Lithography.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1999English

Impact of Imprint Pressure on Residual Layer Thickness in UV Nanoimprint Lithography

DEStech Transactions on Computer Science and Engineering
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Nanoscale Patterning of Magnetic Islands by Imprint Lithography Using a Flexible Mold

Applied Physics Letters
AstronomyPhysics
2002English

Fine Pattern Fabrication on a Polymer Plate by Direct Imprint Lithography

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
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Patterning Nonflat Substrates With a Low Pressure, Room Temperature, Imprint Lithography Process

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2001English

Imaging and Analysis of Transcription on Large, Surface-Mounted Single Template DNA Molecules

Analytical Biochemistry
BiochemistryCell BiologyMolecular BiologyBiophysics
2008English

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