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Publications by Sang-Jun Choi

Chemically Amplified Silicon Containing Resist for ArF Excimer Laser Lithography.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1997English

Bioequivalence of PirosTMTablets to ActosTMTablets (Pioglitazone HCl 15 Mg)

Journal of Korean Pharmaceutical Sciences
2009English

Related publications

Chemically Amplified Si-Contained Resist Using Silsesquoxane for ArF Lithography (CASUAL) and Its Application to Bi-Layer Resist Process.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1997English

O-Nitrobenzyl Ester Based Deep UV Resist for KrF Excimer Laser Lithography

Polymer Journal
PolymersMaterials ChemistryPlastics
1989English

Towards 11nm Half-Pitch Resolution for a Negative-Tone Chemically Amplified Molecular Resist Platform for Extreme-Ultraviolet Lithography

2015English

Metal Containing Resist Readiness for HVM EUV Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2016English

Study of Polymer Ablation Using ArF Excimer Laser.

Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B
Condensed Matter PhysicsMechanical Engineering
1998English

Development of Lithography Based on Excimer Laser.

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
1993English

The Study on Developer Containing Surfactant for ArF Lithography Process

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2004English

Effect of Substrate Treatments on Resist Footing in Chemically Amplified System.

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
1997English

Computational Study of Pattern Formation for Chemically Amplified Resists in Extreme Ultraviolet Lithography

Journal of Photopolymer Science and Technology
Organic ChemistryPolymersMaterials ChemistryPlastics
2019English

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