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Publications by Shuichi NOGAWA

Sillicon Nitride Protective Film by Reactive Ion Beam Sputtering.

English

Kaufman-Type Low-Energy Ion Source.

English

Related publications

Room Temperature Deposition of Superconducting Niobium Nitride Films by Ion Beam Assisted Sputtering

Materials Science

English

Fullerenelike Arrangements in Carbon Nitride Thin Films Grown by Direct Ion Beam Sputtering

Applied Physics Letters

English

Multiple Scale Modeling of Al2O3thin Film Growth in an Ion Beam Sputtering Process

English

ZnO Thin Films Prepared by Ion Beam Sputtering Deposition.

English

Preparation of TiO2 Thin Films by Ion Beam Sputtering Method.

Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

Mechanical Engineering

Materials Chemistry

Manufacturing Engineering

English

Comparison of Magnetron Sputtering and Ion Beam Sputtering on Dispersive Mirrors

Applied Physics B: Lasers and Optics

English

Study of Plasma and Ion Beam Sputtering Processes

Journal of Physical Science and Application

English

Film Fabrication of Fe-B-O System Compounds by Reactive RF-sputtering. (II).

Journal of the Magnetics Society of Japan

English

Li–Si Thin Films for Battery Applications Produced by Ion-Beam Co-Sputtering

Chemical Engineering

English