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Publications by Tommi Suni
Integration of CMP Fixed Abrasive Polishing Into the Manufacturing of Thick Film SOI Substrates
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Related publications
A Novel CMP Process on Fixed Abrasive Pads for the Manufacturing of Highly Planar Thick Film SOI Substrates
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Advances in the CMP Process on Fixed Abrasive Pads for the Polishing of SOISubstrates With High Degree of Flatness
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
The Development of AC Electric Field Assisted Polishing for Silicon Carbide Substrates With Control of Abrasive Behavior
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
Considerations in Formulation and Manufacturing of Thick Film Inks
Microelectronics Journal
Evaluation of Cadmium-Free Thick Film Materials on Alumina Substrates
AEM Study of Thin and Thick Film Metallization on AIN Substrates
Materials Research Society Symposium - Proceedings
Mechanics of Materials
Materials Science
Condensed Matter Physics
Mechanical Engineering
Development of a High Efficiency Polishing Technology Using Abrasive Control Technique With AC Electric Field for Glass Substrates
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
High-Strain Response of Piezoresistive Thick-Film Resistors on Titanium Alloy Substrates
Journal of the European Ceramic Society
Composites
Materials Chemistry
Ceramics
Abrasive Processing and Polishing Technology. Latest Abrasive Materials and Finishing Processes.
Journal of the Surface Finishing Society of Japan
