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Publications by Tomoharu Sato
Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-Like Macrocycle ) Derivatives With Pendant Alkoxyl and Adamantyl Ester Groups
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Synthesis and Property of Tellurium-Containing Polymer for Extreme Ultraviolet Resist Material
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Synthesis of New Photosensitive Polyimides Containing Pendant Propargyl Ester Groups
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Advancements in EUV Resist Materials and Processing
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Terbium-Based Extreme Ultraviolet Multilayers
Optics Letters
Optics
Atomic
Molecular Physics,
Discovery of Sun’s Bharat Radiation Emission Causing Extreme Ultraviolet (EUV) and UV Dominant Optical Radiation
IOSR Journal of Applied Physics
Evaluation of Resist Capability for EUV Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Comparison of Resist Family Outgassing Characterization Between EUV and EB
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Metal Containing Resist Readiness for HVM EUV Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Extreme Ultraviolet (EUV) Solar Spectral Irradiance (SSI) for Ionospheric Application &Ndash; History and Contemporary State-Of-Art
Advances in Radio Science
