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Growth and Interface of HfO2 Films on H-Terminated Si From a TDMAH and H2O Atomic Layer Deposition Process

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2008English

Sputtered W–N Diffusion Barriers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1985English

Growth of Carbon Nanotubes by Microwave Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2000English

Discussion: “Bibliographic Databases in Tribology” (Fries, J. R., and Kennedy, F. E., 1985, ASME J. Tribol., 107, Pp. 285–294)

Journal of Tribology
Mechanics of MaterialsSurfacesMechanical EngineeringInterfacesFilmsCoatings
1985English

Discussion: “An FFT-Based Transient Flash Temperature Model for General Three-Dimensional Rough Surface Contacts” (Gao, J., Lee, S. C., Ai, X., and Nixon, H., 2000, ASME J. Tribol., 122, No. 3, Pp. 519–523)

Journal of Tribology
Mechanics of MaterialsSurfacesMechanical EngineeringInterfacesFilmsCoatings
2000English

Influence of Reactor Wall Conditions on Etch Processes in Inductively Coupled Fluorocarbon Plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1998English

Discussion: “Theoretical Modeling of the Vapor Cavitation in Dynamically Loaded Journal Bearings” (Brewe, D. E., 1986, ASME J. Tribol., 108, Pp. 628–637)

Journal of Tribology
Mechanics of MaterialsSurfacesMechanical EngineeringInterfacesFilmsCoatings
1986English

Tritiated Amorphous Silicon Films and Devices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1998English

Microstructure and Electronic Properties of the Refractory Semiconductor ScN Grown on MgO(001) by Ultra-High-Vacuum Reactive Magnetron Sputter Deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
1998English

Control of Plasma Flux Composition Incident on TiN Films During Reactive Magnetron Sputtering and the Effect on Film Microstructure

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2006English

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