Diffuse X-Ray Streaks From Defects and Surface Features in Boron Implanted Silicon
Physica Status Solidi (B): Basic Research - United Kingdom
doi 10.1002/(sici)1521-3951(199909)215:1<779::aid-pssb779>3.0.co;2-d
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Date
September 1, 1999
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Wiley-Blackwell