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Publications by Chee Won Chung

Etch Characteristics of Nickel Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

Electrochemical and Solid-State Letters

English

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Reactive Ion Etching Characteristics of Permalloy Thin Films

Journal of the Magnetics Society of Japan

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Etch Characteristics of Optical Waveguides Using Inductively Coupled Plasmas With Multidipole Magnets

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

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Fabrication of Low Loss Polymer Inverse Ridge Waveguide Using Inductively Coupled Plasma Etching

Chinese Optics Letters

Electronic Engineering

Molecular Physics,

Magnetic Materials

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Determination of Trace Impurities in Tantalum Oxide Films by Inductively Coupled Plasma Mass Spectrometry Combined With Ion Exchange

Analytical Sciences

Analytical Chemistry

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Characteristics of Inductively Coupled Cl2/BCl3 Plasmas During GaN Etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

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Characterizations of Nickel Oxide Thin Films Prepared by Reactive Radio Frequency Magnetron Sputtering

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Predictions of Ion Energy Distributions and Radical Fluxes in Radio Frequency Biased Inductively Coupled Plasma Etching Reactors

Journal of Applied Physics

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High Etch Rate and Smooth Morphology Using a Novel Chemistry in Reactive Ion Etching of GaN

Electrochemical and Solid-State Letters

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Reactive Ion Etching of SiGe Alloys Using HBr

Applied Physics Letters

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