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Publications by Christopher N. Anderson

The Role of Wing Coloration in Sex Recognition and Competitor Recognition in Rubyspot Damselflies (Hetaerinaspp.)

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In-Situ Testing of High Resolution Optical Systems via Localized Wavefront Curvature Sensing

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Overview and Status of the 0.5NA EUV Microfield Exposure Tool at Berkeley Lab

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Low-Speckle Holographic Beam Shaping of High-Coherence EUV Sources

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Pushing Extreme Ultraviolet Lithography Development Beyond 22 Nm Half Pitch

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

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A High-Throughput Contact-Hole Resolution Metric for Photoresists: Full-Process Sensitivity Study

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Lithographic Metrics for the Determination of Intrinsic Resolution Limits in EUV Resists

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