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Publications by Erik M. Secula

Scanning He+ Ion Beam Microscopy and Metrology

English

TSOM Method for Nanoelectronics Dimensional Metrology

English

Analysis of the Noble Metals on Silicon Wafers by Chemical Collection and ICPMS

English

Current Voltage Characteristics Through Grains and Grain Boundaries of High-K Dielectric Thin Films Measured by Tunneling Atomic Force Microscopy

English

The Impact of Organic Contamination on the Oxide-Silicon Interface

English

Characterization of Nanodevices by STEM Tomography

English

Protocol Optimisation for Work-Function Measurements of Metal Gates Using Kelvin Force Microscopy

AIP Conference Proceedings

English

Development of a Focused-Beam Ellipsometer Based on a New Principle

AIP Conference Proceedings

English

The Continuous Anodic Oxidation Technique

AIP Conference Proceedings

English

Metrology and Characterization for Extending Silicon CMOS

AIP Conference Proceedings

English