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Publications by Han Na Cho

Etch Characteristics of Nickel Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

Electrochemical and Solid-State Letters

English

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Reactive Ion Etching Characteristics of Permalloy Thin Films

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Fabrication of Low Loss Polymer Inverse Ridge Waveguide Using Inductively Coupled Plasma Etching

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Determination of Trace Impurities in Tantalum Oxide Films by Inductively Coupled Plasma Mass Spectrometry Combined With Ion Exchange

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Characteristics of Inductively Coupled Cl2/BCl3 Plasmas During GaN Etching

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Characterizations of Nickel Oxide Thin Films Prepared by Reactive Radio Frequency Magnetron Sputtering

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Predictions of Ion Energy Distributions and Radical Fluxes in Radio Frequency Biased Inductively Coupled Plasma Etching Reactors

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High Etch Rate and Smooth Morphology Using a Novel Chemistry in Reactive Ion Etching of GaN

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Reactive Ion Etching of SiGe Alloys Using HBr

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