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Publications by LK Ballast

SEM Imaging of Resist Patterns Fabricated Through Imprint Lithography Techniques

Microscopy and Microanalysis

Instrumentation

English

Related publications

Fabrication of Imprint Mold With Nanotrench Patterns by Edge Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Photoluminescence Enhancement of Silicon Quantum Dot Monolayer by Plasmonic Substrate Fabricated by Nano-Imprint Lithography

Journal of Applied Physics

English

Metallic Resist for Phase-Change Lithography

Scientific Reports

Multidisciplinary

English

Evaluation of Resist Capability for EUV Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Immersion Lithography: Topcoat and Resist Processes

English

Evaluation of EUV Resist Performance Using Interference Lithography

English

Metal Containing Resist Readiness for HVM EUV Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Impact of Imprint Pressure on Residual Layer Thickness in UV Nanoimprint Lithography

DEStech Transactions on Computer Science and Engineering

English

Nanoscale Patterning of Magnetic Islands by Imprint Lithography Using a Flexible Mold

Applied Physics Letters

English